¹ Prokhorov General Physics Institute of the Russian Academy of Sciences, Moscow

² Department of laser micro-, nano- and biotechnologies, Institute of engineering physics for biomedicine, National Research Nuclear University "MEPHI", Moscow

³ Laboratory of gene engineering of pathogenic microorganisms, N.F. Gamaleya National Research Center of Epidemiology and Microbiology, Moscow

⁴ Organic Intermediates and Dyes Institute, Moscow

Correspondеnce should be adressed: Gennady A. Meerovich
Vavilova, 38, Moscow, 119991;